Chris Mack goes deep (UV)

Jul 23rd, 2012 | By | Category: Technology

With all the excitement at Semicon West 2012 about the move to 450mm wafer manufacturing, New Tech Press decided to call up the Lithoguru, Chris Mack, to get a reality check on the news.  As usual, Dr. Mack was more circumspect than excited. Mack was vice president of lithography technology for KLA-Tencor. before “retiring” to write, teach and consult in the field of semiconductor lithography.  He has trained more than 2,000 lithographers from over 200 different companies around the world, and is an adjunct faculty member in the Electrical and Computer Engineering and Chemical Engineering Departments of the University of Texas at Austin. In January 2012 he become Editor-In-Chief of the Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3).

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